Beam analyzer

The Laser Beam Profiler provides high resolution real-time monitoring and quantitative characterization of spatial beam intensity distributions. Primarily designed for excimer lasers, it may be utilized for all pulsed or cw lasers as well as for incoherent sources, covering an extremely wide spectral range from NIR to soft X-rays. The UV/EUV sensitivity is achieved by a quantum conversion coating on the CCD chip.

A variety of different sensor types (large /small area, highest spatial resolution, sensitivity and dynamic range) are available and can be adapted to specific applications. The software supports also peripheric devices like adaptive mirrors, stepper motors, attenuators, shutters or power monitors. Automated ore remote-controlled measurements are facilitated by the help of a powerful macro language.

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